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Photonic crystal thin films of GaAs prepared by atomic layer deposition

Applied Physics Letters, ISSN: 0003-6951, Vol: 89, Issue: 10
2006
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Metrics Details

  • Citations
    27
    • Citation Indexes
      27
  • Captures
    29

Article Description

Photonic crystal thin films were fabricated via the self-assembly of a lattice of silica spheres on silicon (100) substrates. Progressive infilling of the air spaces within the structure with GaAs was achieved using trimethylgallium and arsine under atomic-layer-deposition conditions. Samples with the highest levels of GaAs infill were subsequently inverted using selective etching. Reflectance spectra are interpreted via the Bragg expression and calculated photonic band structure diagrams. For GaAs infilled and inverted samples, the relative positions of the first and second order Bragg reflections are strongly influenced by the wavelength dependent refractive index. © 2006 American Institute of Physics.

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