Application of triangular atomic force microscopy cantilevers to friction measurement with the improved parallel scan method
Review of Scientific Instruments, ISSN: 0034-6748, Vol: 80, Issue: 2, Page: 023704
2009
- 4Citations
- 22Captures
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Example: if you select the 1-year option for an article published in 2019 and a metric category shows 90%, that means that the article or review is performing better than 90% of the other articles/reviews published in that journal in 2019. If you select the 3-year option for the same article published in 2019 and the metric category shows 90%, that means that the article or review is performing better than 90% of the other articles/reviews published in that journal in 2019, 2018 and 2017.
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Metrics Details
- Citations4
- Citation Indexes4
- CrossRef4
- Captures22
- Readers22
- 22
Article Description
The atomic force microscopy (AFM) can provide tribological information in micro/nanoscale. However, the general measurement techniques require rigorous value of stiffness and relationship between AFM cantilever deformation and corresponding photodetector response. In this study, triangular AFM cantilevers with different dimensions are applied to quantitatively measure the coefficient of friction with the improved parallel scan method [Y. L. Wang, X. Z. Zhao, and F. Q. Zhou, Rev. Sci. Instrum. 78, 036107 (2007)]. An analytical model is first presented with the plan-view geometrical dimensions of cantilevers. Finite element analysis (FEA) models are set up to validate the analytical model. The results show good agreement between analytical calculation and FEA simulation. More importantly, the coefficient of friction obtained with different cantilevers on silicon surface shows a good consistency. At last, the factors which may affect measurement are discussed. The advantage of the model presented here is that the general uncertainties of thickness and Young's modulus are not necessary to be known for the friction force calibration in AFM application. © 2009 American Institute of Physics.
Bibliographic Details
AIP Publishing
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