Interdiffusion and crystallization in HfO / Al O superlattices
Applied Physics Letters, ISSN: 0003-6951, Vol: 95, Issue: 9
2009
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Article Description
The interplay of interdiffusion and crystallization in HfO /AlO superlattices during spike annealing at 1050 °C was studied using x-ray reflectivity and x-ray diffraction. A transition in thermal stability was found as a function of HfO thickness between 2.3 and 3.2 nm. This transition is due to a crossover of HfO crystallization and amorphous HfO/Al O interdiffusion kinetics. For thin HfO, amorphous HfO and AlO interdiffuse and subsequently crystallize as HfAlO into a cubic-HfO-like phase. For thicker HfO, HfO layers crystallize individually into the monoclinic phase. As a consequence, interdiffusion between HfO and AlO is suppressed because of the immiscibility of AlO in monoclinic HfO. © 2009 American Institute of Physics.
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