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Infrared optical properties of silicon oxynitride films: Experimental data and theoretical interpretation

Journal of Applied Physics, ISSN: 0021-8979, Vol: 60, Issue: 6, Page: 2081-2091
1986
  • 159
    Citations
  • 0
    Usage
  • 45
    Captures
  • 0
    Mentions
  • 0
    Social Media
Metric Options:   Counts1 Year3 Year

Metrics Details

  • Citations
    159
    • Citation Indexes
      159
  • Captures
    45

Article Description

Films of SiON, with 0.25≲x≲2 and 0

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