PlumX Metrics
Embed PlumX Metrics

Tungsten-carbon multilayer composition and the effects of annealing: A glancing angle extended x-ray absorption fine structure study

Journal of Applied Physics, ISSN: 0021-8979, Vol: 65, Issue: 11, Page: 4250-4255
1989
  • 26
    Citations
  • 0
    Usage
  • 2
    Captures
  • 0
    Mentions
  • 0
    Social Media
Metric Options:   Counts1 Year3 Year

Metrics Details

  • Citations
    26
    • Citation Indexes
      26
  • Captures
    2

Article Description

Results are presented from a glancing angle extended x-ray absorption fine structure study to investigate the structure of W/C multilayers and the effects of moderate annealing. There is evidence of considerable interlayer mixing prior to any heat treatment. It is found that after annealing to 350°C for several hours, drastic changes can occur in the structural environment of the W atoms, with minimal changes in the reflectivity of the sample. There is extensive formation of WC depending on the W thickness and the W/C ratio. Identification of this carbide as the product of annealing is unambiguous. Above a critical thickness, W begins to grow in its bcc form within the W layer, as it is prepared. This bcc layer is unaffected by the annealing process. The presence of carbon is shown to stabilize the amorphous state of W and inhibits any formation of WC when the W thickness and W/C ratio are small.

Bibliographic Details

Provide Feedback

Have ideas for a new metric? Would you like to see something else here?Let us know