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Determination of interface roughness cross correlation of thin films from spectroscopic light scattering measurements

Journal of Applied Physics, ISSN: 0021-8979, Vol: 81, Issue: 8, Page: 3627-3636
1997
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Diffuse reflectance and transmittance spectra collected in different scattering angle intervals have been analyzed in order to determine the interface roughness cross correlation of thin films. Different angle intervals correspond to different roughness length scales; the cross correlation as a function of length scale can hence be determined. Sputter deposited ZrO films were analyzed. The transition from correlated to uncorrelated film interfaces was found to occur at longer length scales, when the film thickness increased. © 1997 American Institute of Physics.

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