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The site-specific reactivity of isopropanol in aqueous silicon etching: Controlling morphology with surface chemistry

Journal of Chemical Physics, ISSN: 0021-9606, Vol: 111, Issue: 20, Page: 9125-9128
1999
  • 37
    Citations
  • 0
    Usage
  • 11
    Captures
  • 0
    Mentions
  • 0
    Social Media
Metric Options:   Counts1 Year3 Year

Metrics Details

  • Citations
    37
    • Citation Indexes
      37
  • Captures
    11

Article Description

The site-specific rates of isopropanol reaction on Si(111) were studied by kinetic competition with an etchant of known anisotropy and quantified using concentration-dependent changes in the etched surface morphology using a combination of STM measurements and kinetic Monte Carlo simulations. The isopropoxide ion was identified as the active species. © 1999 American Institute of Physics.

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