The initial stages of atomic force microscope based local anodic oxidation of silicon
AIP Advances, ISSN: 2158-3226, Vol: 8, Issue: 2
2018
- 8Citations
- 18Captures
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Article Description
In this paper, the initial stages of local anodic oxidation (LAO) process initiated by AFM probe are studied on the wide (∼100μm) terraces of the atomic-smooth Si (111) surface when creating dense array of local oxidation points. The dependence of LAO points height on the value of voltage initiating the oxidation is found to have a pronounced step-like feature with a characteristic period of 0.7 ± 0.1 nm. The presented analysis shows for the first time the realization of the step-layer mechanism of anodic oxide growth on the Si (111) surface.
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