PlumX Metrics
Embed PlumX Metrics

A piezoelectric mechanically coupled Lamé mode resonator with ultra-high Q

Applied Physics Letters, ISSN: 0003-6951, Vol: 122, Issue: 11
2023
  • 3
    Citations
  • 0
    Usage
  • 4
    Captures
  • 1
    Mentions
  • 0
    Social Media
Metric Options:   Counts1 Year3 Year

Metrics Details

  • Citations
    3
  • Captures
    4
  • Mentions
    1
    • News Mentions
      1
      • News
        1

Most Recent News

Reports on Applied Physics from Wuhan University Provide New Insights (A Piezoelectric Mechanically Coupled Lame Mode Resonator With Ultra-high Q)

2023 APR 17 (NewsRx) -- By a News Reporter-Staff News Editor at Physics Daily News -- Current study results on Applied Physics have been published.

Article Description

A piezoelectrically actuated high quality factor (Q) mechanically coupled Lamé mode resonator based on a thin-film piezoelectric-on-silicon (TPoS) platform is demonstrated. The reported coupled resonator consists of two identical square plates of single-crystal silicon (SCS) coupled with a SCS beam having thin-film piezoelectric stacked layers on top. The coupled resonator is piezoelectrically driven into resonance, and the two square plates are excited into vibrations in a coupled Lamé mode through mechanical coupling. An impressive passive Q-enhancement is obtained by such a scheme based on mechanical coupling of two SCS square plates with a piezoelectrically transduced beam. A fabricated mechanically coupled Lamé mode resonator exhibits an ultra-high Q of 309 894 while still maintaining a moderate impedance (Rm) of 6652 ω at its resonant frequency of 18.2838 MHz, corresponding to the record highest f-Q product of 5.67 × 1012 for TPoS resonators. The reported high Q microelectromechanical system (MEMS) resonator overcomes the inherent low-Q nature of piezoelectric MEMS resonators, indicating an application for providing a high-performance timing solution in a MEMS timing field.

Bibliographic Details

Provide Feedback

Have ideas for a new metric? Would you like to see something else here?Let us know