Electrode design and planar uniformity of anodically etched large area porous silicon
Semiconductor Science and Technology, ISSN: 0268-1242, Vol: 17, Issue: 1, Page: 55-59
2002
- 30Citations
- 15Captures
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Article Description
The structure of electrodes in the electrochemical formation cell of porous silicon greatly influences the planar uniformity of the porous silicon layer. In this paper a systematic study of the planar uniformity of large area porous silicon layer formed by different electrode structure is reported based on photoluminescence and reflectance scanning of the surface. A new design of the electrode structure is developed for achieving satisfactory planar uniformity of large area porous silicon layer.
Bibliographic Details
http://www.scopus.com/inward/record.url?partnerID=HzOxMe3b&scp=0036142881&origin=inward; http://dx.doi.org/10.1088/0268-1242/17/1/309; https://iopscience.iop.org/article/10.1088/0268-1242/17/1/309; https://dx.doi.org/10.1088/0268-1242/17/1/309; https://validate.perfdrive.com/9730847aceed30627ebd520e46ee70b2/?ssa=17af3537-578a-49ec-8009-39cf2c52c204&ssb=96935268990&ssc=https%3A%2F%2Fiopscience.iop.org%2Farticle%2F10.1088%2F0268-1242%2F17%2F1%2F309&ssi=1eda7de7-cnvj-4f93-bb34-a58a7ceba5d8&ssk=botmanager_support@radware.com&ssm=419880411552682721000429375181080107&ssn=19fccb9efd41ffddbf8fb25bc6a40bd0e590fe105911-65fe-48dc-8ae25a&sso=9bb2e150-9319bfde79b5f79a81b1dc5f3039075d54e611cddf0decac&ssp=90740555561726227859172634741736191&ssq=58257927511122291844163731174994276670751&ssr=NTIuMy4yMTcuMjU0&sst=com.plumanalytics&ssu=&ssv=&ssw=&ssx=eyJ1em14IjoiN2Y5MDAwMzZjZDcxYjQtYzE1Yy00OTVhLWFjNjEtNTM4YWIxMWM0ZjdhMy0xNzI2MjYzNzMxNDQwMTExMzc5NzI3LWExMzkzMmJjMzQzYWYyMDkxMDAwMTgiLCJyZCI6ImlvcC5vcmciLCJfX3V6bWYiOiI3ZjYwMDBmY2NjNzQxOC1mYzFiLTRjNmEtODMwYS1iMjY5YmYxNWM5NTIxNzI2MjYzNzMxNDQwMTExMzc5NzI3LTA1NjMzNGMwNjAyY2U1MTgxMDAwMjcifQ==
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