Self-patterning of arrays of ferroelectric capacitors: Description by theory of substrate mediated strain interactions
Journal of Physics Condensed Matter, ISSN: 0953-8984, Vol: 15, Issue: 44, Page: L667-L671
2003
- 59Citations
- 25Captures
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Letter Description
Self-patterning presents an appealing alternative to lithography for the production of arrays of nanoscale ferroelectric capacitors for use in high density non-volatile memory devices. However current levels of registration achieved experimentally are far from adequate for this application. To provide a guide for experiment we have applied the theories developed for self-patterning of semiconductor nanocrystals to two self-patterning systems of potential interest for ferroelectric memory applications, metallic bismuth oxide on bismuth titanate and ferroelectric lead zirconate titanate on strontium titanate.
Bibliographic Details
http://www.scopus.com/inward/record.url?partnerID=HzOxMe3b&scp=0345283362&origin=inward; http://dx.doi.org/10.1088/0953-8984/15/44/l03; https://iopscience.iop.org/article/10.1088/0953-8984/15/44/L03; http://stacks.iop.org/0953-8984/15/i=44/a=L03/pdf; https://dx.doi.org/10.1088/0953-8984/15/44/l03; https://validate.perfdrive.com/fb803c746e9148689b3984a31fccd902/?ssa=88ad0522-580d-4b6a-96e9-d64e9d6cbb52&ssb=19529231555&ssc=https%3A%2F%2Fiopscience.iop.org%2Farticle%2F10.1088%2F0953-8984%2F15%2F44%2FL03&ssi=054e4c9c-8427-46fa-bfb7-968493c7b7e8&ssk=support@shieldsquare.com&ssm=32876089339290733707985225764476333&ssn=696387c8155cf2977ac09ad7ef9bcc2654b42f0fbc69-9e01-4767-9a9cc4&sso=3a3bf809-259ac1c821e114b26af2274de65f01c324a6fbb905a9ac70&ssp=69595389891721236843172148943261401&ssq=19306511534899809280236784290418331768636&ssr=NTIuMy4yMTcuMjU0&sst=com.plumanalytics&ssu=&ssv=&ssw=&ssx=eyJfX3V6bWYiOiI3ZjYwMDBkOTY2YjBkNC1iNDc3LTQzMmYtYmU0My0xZTA0NjEwMTgxNzgxNzIxMjM2Nzg0NTAyMTc4NTYzOTEzLTM0MzMxMWY0N2YwNGQ0ZWU3MDc5OCIsInV6bXgiOiI3ZjkwMDBjNGE5MjgxYS01ZmMxLTRkZjMtYjg3Ni1iOTY3ZDg5NWI5MjUzLTE3MjEyMzY3ODQ1MDIxNzg1NjM5MTMtMGRiMWVkMWViNDVjOTYxNjcwNzk1IiwicmQiOiJpb3Aub3JnIn0=
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