Characterisation of sol-gel PZT films on Pt-coated substrates
Journal of Micromechanics and Microengineering, ISSN: 0960-1317, Vol: 5, Issue: 2, Page: 153-155
1995
- 11Citations
- 4Captures
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Article Description
A conventional sol-gel process was used to spin-cast PZT films on oxidized Si wafers coated with sputtered Pt layers. After annealing at 550 degrees C-800 degrees C, the resulting perovskite-type PZT films showed different textures and surface morphologies, depending on whether or not a Ti adhesion layer was used. If a Ti layer was present, Ti diffusion into and through the Pt film leads to a compound PtTi, which facilitates crystallization of the perovskite PZT phase; without Ti, crystallization is more difficult and occurs via the growth of dendritic crystallites. Several optical and electrical properties of the PZT films have been measured; the first results indicate high dielectric constants ( epsilon approximately=480) and acceptable ferroelectric behaviour.
Bibliographic Details
http://www.scopus.com/inward/record.url?partnerID=HzOxMe3b&scp=0029325617&origin=inward; http://dx.doi.org/10.1088/0960-1317/5/2/025; https://iopscience.iop.org/article/10.1088/0960-1317/5/2/025; https://dx.doi.org/10.1088/0960-1317/5/2/025; https://validate.perfdrive.com/9730847aceed30627ebd520e46ee70b2/?ssa=2ed335ac-11b1-4f94-9013-086077e4cc16&ssb=51985288710&ssc=https%3A%2F%2Fiopscience.iop.org%2Farticle%2F10.1088%2F0960-1317%2F5%2F2%2F025&ssi=a1277ecb-cnvj-4a73-8872-6e8f05db10ec&ssk=botmanager_support@radware.com&ssm=64887192729848667950747003765909127&ssn=d50a9dafd28b9fd37ca66ff5f8acd2f7cb620900c3c4-8990-4f21-aebdc6&sso=fb38df8c-bc564dd29dea37f9ff61e2b8b5f9a7f91df4538a7f1e42b3&ssp=65621312471726523346172654600516980&ssq=44790394985966455172629239149570402407109&ssr=NTIuMy4yMTcuMjU0&sst=com.plumanalytics&ssu=&ssv=&ssw=&ssx=eyJfX3V6bWYiOiI3ZjYwMDBkNzYzNGE3Ni05ZTRkLTRjMmMtYjJhMC1mYzAzNGMyZjE1MjkxNzI2NTI5MjM5NDUzMjA2MTk3MzQtZjdiZDFlNjZkOGM1NTdmNzk1MDYyIiwidXpteCI6IjdmOTAwMDBjMWQ3NmJiLTM5NjEtNDdlYy05ZGRiLTY3ZmE1YWU2Njg3ZTItMTcyNjUyOTIzOTQ1MzIwNjE5NzM0LWNkMGY3YWRkYjVmNTYyZTc5NTA0NCIsInJkIjoiaW9wLm9yZyJ9
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