PlumX Metrics
Embed PlumX Metrics

Design, fabrication, and characterization of Ti/Au transition-edge sensor with different dimensions of suspended beams

Chinese Physics B, ISSN: 2058-3834, Vol: 30, Issue: 11
2022
  • 1
    Citations
  • 0
    Usage
  • 0
    Captures
  • 0
    Mentions
  • 0
    Social Media
Metric Options:   Counts1 Year3 Year

Metrics Details

  • Citations
    1

Article Description

For photon detection, superconducting transition-edge sensor (TES) micro-calorimeters are excellent energy-resolving devices. In this study, we report our recent work in developing Ti-/Au-based TES. The Ti/Au TES devices were designed and implemented with a thickness ratio of 1:1 and different suspended structures using micromachining technology. The characteristics were evaluated and analyzed, including surface morphology, 3D deformation of suspended Ti/Au TES device structure, I-V characteristics, and low-temperature superconductivity. The results showed that the surface of Ti/Au has good homogeneity and the surface roughness of Ti/Au is significantly increased compared with the substrate. The structure of Ti/Au bilayer film significantly affects the deformation of suspended devices, but the deformation does not affect the I-V characteristics of the devices. For devices with the Ti/Au bilayer (150 - m 150 µm) and beams (100 µ m 25 µm), the transition temperature (T c) is 253 mK with a width of 6 mK, and the value of the temperature sensitivity a is 95.1.

Provide Feedback

Have ideas for a new metric? Would you like to see something else here?Let us know