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Silicon micromachined photonic crystal integrated in an opto-fluidic microsystem

2011 International Workshop on Biophotonics, BIOPHOTONICS 2011, Page: 1-3
2011
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Conference Paper Description

In this work, fabrication and testing of closed-loop opto-fluidic microsystems integrating both optical and fluidic functionalities on the same chip are reported. The microsystems consisted of an electrochemically micromachined silicon substrate, on which high-order vertical silicon/air one dimensional photonic crystals (1D PhCs) were integrated together with fluidic microchannels, bonded to a glass cover, the latter provided with inlet/outlet holes for liquid injection/extraction in/out the PhCs air gaps. An experimental characterization was performed by pumping different liquids (water, ethanol, isopropanol) through the opto-fluidic microsystem and by measuring the reflectivity spectrum in the wavelength range 1.0-1.7 m (at normal incidence) with an inplane fiber optic setup. Experimental results, which well agreed with theoretical predictions, demonstrated the high sensitivity of the opto-fluidic microsystem in measuring small refractive index changes, which was estimated to be 1049 nm/RIU. © 2011 IEEE.

Bibliographic Details

S. Surdo; L. M. Strambini; G. Barillaro; F. M. Carpignano; S. Merlo

Institute of Electrical and Electronics Engineers (IEEE)

Biochemistry, Genetics and Molecular Biology; Engineering

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