Silicon micromachined photonic crystal integrated in an opto-fluidic microsystem
2011 International Workshop on Biophotonics, BIOPHOTONICS 2011, Page: 1-3
2011
- 1Citations
- 7Captures
Metric Options: CountsSelecting the 1-year or 3-year option will change the metrics count to percentiles, illustrating how an article or review compares to other articles or reviews within the selected time period in the same journal. Selecting the 1-year option compares the metrics against other articles/reviews that were also published in the same calendar year. Selecting the 3-year option compares the metrics against other articles/reviews that were also published in the same calendar year plus the two years prior.
Example: if you select the 1-year option for an article published in 2019 and a metric category shows 90%, that means that the article or review is performing better than 90% of the other articles/reviews published in that journal in 2019. If you select the 3-year option for the same article published in 2019 and the metric category shows 90%, that means that the article or review is performing better than 90% of the other articles/reviews published in that journal in 2019, 2018 and 2017.
Citation Benchmarking is provided by Scopus and SciVal and is different from the metrics context provided by PlumX Metrics.
Example: if you select the 1-year option for an article published in 2019 and a metric category shows 90%, that means that the article or review is performing better than 90% of the other articles/reviews published in that journal in 2019. If you select the 3-year option for the same article published in 2019 and the metric category shows 90%, that means that the article or review is performing better than 90% of the other articles/reviews published in that journal in 2019, 2018 and 2017.
Citation Benchmarking is provided by Scopus and SciVal and is different from the metrics context provided by PlumX Metrics.
Conference Paper Description
In this work, fabrication and testing of closed-loop opto-fluidic microsystems integrating both optical and fluidic functionalities on the same chip are reported. The microsystems consisted of an electrochemically micromachined silicon substrate, on which high-order vertical silicon/air one dimensional photonic crystals (1D PhCs) were integrated together with fluidic microchannels, bonded to a glass cover, the latter provided with inlet/outlet holes for liquid injection/extraction in/out the PhCs air gaps. An experimental characterization was performed by pumping different liquids (water, ethanol, isopropanol) through the opto-fluidic microsystem and by measuring the reflectivity spectrum in the wavelength range 1.0-1.7 m (at normal incidence) with an inplane fiber optic setup. Experimental results, which well agreed with theoretical predictions, demonstrated the high sensitivity of the opto-fluidic microsystem in measuring small refractive index changes, which was estimated to be 1049 nm/RIU. © 2011 IEEE.
Bibliographic Details
Institute of Electrical and Electronics Engineers (IEEE)
Provide Feedback
Have ideas for a new metric? Would you like to see something else here?Let us know