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Time-stability measurement and compensation of a scanning probe microscope instrument

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena, ISSN: 1071-1023, Vol: 18, Issue: 4, Page: 2027-2029
2000
  • 11
    Citations
  • 0
    Usage
  • 7
    Captures
  • 0
    Mentions
  • 0
    Social Media
Metric Options:   Counts1 Year3 Year

Metrics Details

  • Citations
    11
    • Citation Indexes
      11
      • CrossRef
        11
  • Captures
    7

Article Description

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena

Bibliographic Details

Wenhao Huang; Wenwei Wang; Andong Xia; Nong Jin; ZhiQiang Hu

American Vacuum Society

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