Density changes upon crystallization of GeSbTe films
Journal of Vacuum Science and Technology, Part A: Vacuum, Surfaces and Films, ISSN: 0734-2101, Vol: 20, Issue: 1, Page: 230-233
2002
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Article Description
An overview is given on the effectiveness of temperature-dependent measurements, x-ray diffraction, and x-ray reflectometry as tools for investigation of density change upon crystallization. The magnitude of the density change upon crystallization provides crucial information about cyclabillity limitations of the phase change material for application as an active layer in a phase change device.
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