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Measurements of neutral plasma species in an argon/isopropyl alcohol plasma for the deposition of organic films

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, ISSN: 0734-2101, Vol: 21, Issue: 5, Page: 1724-1733
2003
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Conference Paper Description

The measurement of neutral plasma species in an argon/isopropyl alcohol plasma for the deposition of organic films was discussed. It was found that at elevated pressures, the neutral methyl radicals abstract hydrogen from gas-phase isopropyl alcohol molecules to form methane. The analysis showed that as the pressure increased, the plasma became more remote from the deposition surface.

Bibliographic Details

Daniel C. Guerin; Richard F. Fernsler; Vasgen A. Shamamian

American Vacuum Society

Physics and Astronomy; Materials Science

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