Electron cyclotron resonance plasma sputtering growth of textured films of c-axis-oriented LiNbO on Si(100) and Si(111) surfaces
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, ISSN: 0734-2101, Vol: 22, Issue: 4, Page: 1793-1798
2004
- 26Citations
- 8Captures
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Conference Paper Description
The textured films of c-axis-oriented lithium niobate in a single phase, grown on silicon substrates, by electron cyclotron resonance (ECR) were discussed. The partial pressure of oxygen played an important role in determination of the film's composition. The nucleation in the lithium niobate phase was observed under oxygen-defecient conditions. The XTEM analysis revealed that 40 percent of the domains were established to be c-axis-oriented.
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