Synthesis of carbon nanotubes: Controlled fabrication of intraconnects

The authors have successfully fabricated carbon nanotubes bridges (intraconnects) between predetermined layouts of metal tip electrodes, taking advantage of the tips as leading catalytic points. Overall, the authors have demonstrated a yield of 15%-30% depending on the process parameters and electrode layout. They used two deposition methods: chemical vapor deposition (CVD) and plasma enhanced CVD (PECVD). Bridges could be fabricated with only CVD. The authors used carbon monoxide (CO) for the CVD process; the PECVD, however, required a mixture of CO and H2. Ethanol was successfully used with both deposition methods. © 2007 American Vacuum Society.