PlumX Metrics
Embed PlumX Metrics

Novel fabrication technique for nanoscale hydrogen silsesquioxane structures using a direct printing technique

Journal of Vacuum Science and Technology B, ISSN: 2166-2754, Vol: 29, Issue: 5
2011
  • 15
    Citations
  • 0
    Usage
  • 15
    Captures
  • 0
    Mentions
  • 0
    Social Media
Metric Options:   Counts1 Year3 Year

Metrics Details

  • Citations
    15
    • Citation Indexes
      15
  • Captures
    15

Article Description

Hydrogen silsesquioxane (HSQ), a type of spin-on glass, is an attractive material for nanobio, semiconductor and photoelectronic applications because it can be transformed into SiO by a simple annealing process. Studies on the fabrication of nanosized structures are necessary for the simple and easy production of HSQ nanostructures because of their unique characteristics. In this study, a fabrication method was developed for HSQ nanostructures as small as 50 nm using a direct printing technique with a poly (dimethylsiloxane) (PDMS) mold. Using this technique, HSQ nanostructures can be fabricated on a curved substrate © 2011 American Vacuum Society.

Bibliographic Details

Ki Yeon Yang; Sang Chul Oh; Hyungwon Park; Heon Lee

American Vacuum Society

Materials Science; Physics and Astronomy; Chemical Engineering; Engineering

Provide Feedback

Have ideas for a new metric? Would you like to see something else here?Let us know