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Preparation and structural characterization of nanostructured CoAg granular films

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, ISSN: 1071-1023, Vol: 15, Issue: 4, Page: 1456-1459
1997
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Article Description

The microstructures of as-deposited and annealed CoAg granular films fabricated by ion-beam cosputtering technique were characterized using x-ray diffraction, transmission electron microscopy (TEM), and ferromagnetic resonance (FMR) methods. For the CoAg sample, the changes in size and shape of the nanoscale cobalt granules embedded in the film closely depend on the annealing temperature (T). Real time observation in situ of TEM together with FMR spectra indicate that the size and shape of the cobalt granules evolve primarily along the film plane during the annealing process. Also, the FMR results indicate that the cobalt granules are still single domain particles embedded in the film as the sample is annealed up to 700 K. © 1997 American Vacuum Society.

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