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Calculation of Self-Sputtering Yield under Ion Bombardment of Solids: Computer Simulation and Theory

Technical Physics, ISSN: 1063-7842, Vol: 63, Issue: 10, Page: 1455-1458
2018
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Article Description

Abstract: We developed a computer simulation program for investigation of solid self-sputtering under ion bombardment. The program is based on binary collision approximation, truncated Coulomb potential, and the model of local inelastic losses proportional to energy. As a result of simulation, the self-sputtering yield is calculated as a function of atomic number and ion energy. To verify the cascade simulation code, we created a self-sputtering theory for the case of hard sphere potential. Simulation results show good agreement with both experimental data and theory.

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