Composition and structure of copper oxide films synthesized by reactive magnetron sputtering with a hot target
Glass Physics and Chemistry, ISSN: 1087-6596, Vol: 42, Issue: 4, Page: 359-362
2016
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- 10Captures
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Article Description
The influence of the target operation mode on the chemical composition and crystalline structure of copper oxide films deposited onto a quartz glass substrate has been studied using Raman spectroscopy and X-ray phase analysis. The films have been synthesized in an Ar + O gaseous environment using two identical magnetrons, differing only by the method of target cooling.
Bibliographic Details
http://www.scopus.com/inward/record.url?partnerID=HzOxMe3b&scp=84981207019&origin=inward; http://dx.doi.org/10.1134/s108765961604009x; http://link.springer.com/10.1134/S108765961604009X; http://link.springer.com/content/pdf/10.1134/S108765961604009X; http://link.springer.com/content/pdf/10.1134/S108765961604009X.pdf; http://link.springer.com/article/10.1134/S108765961604009X/fulltext.html; https://dx.doi.org/10.1134/s108765961604009x; https://link.springer.com/article/10.1134/S108765961604009X
Pleiades Publishing Ltd
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