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Surface Functionalization of Quasi-Two-Dimensional MoS in Nitrogen and Oxygen Plasma

Inorganic Materials: Applied Research, ISSN: 2075-115X, Vol: 15, Issue: 3, Page: 707-715
2024
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Article Description

The effect of nitrogen and oxygen plasma on quasi-two-dimensional MoS films is studied experimentally and theoretically in order to identify the main mechanisms of surface functionalization and the influence on the structure and on the properties of the films. Diagnostics of samples before and after treatment using radicals and ions is carried out ex situ using Raman spectroscopy, spectroscopic ellipsometry, X‑ray photoelectron spectroscopy, etc. It is shown that the effect of the nitrogen and oxygen plasma on ultrathin MoS films results in modifying the near-surface layers of the samples due to removal of sulfur and incorporation of incident atoms into the resulting vacancies. The simulation of density functional theory is applied to reveal the main mechanisms of surface functionalization in MoS monolayers and to explain the experimental results.

Bibliographic Details

D. E. Melezhenko; D. V. Lopaev; Yu. A. Mankelevich; S. A. Khlebnikov; A. A. Solovykh; L. S. Novikov; E. N. Voronina

Pleiades Publishing Ltd

Materials Science; Engineering

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