Properties of titanium layers deposited by collimation sputtering
Japanese Journal of Applied Physics, ISSN: 1347-4065, Vol: 31, Issue: 12, Page: L1746-L1749
1992
- 22Citations
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Metrics Details
- Citations22
- Citation Indexes22
- 22
- CrossRef13
Article Description
Properties of titanium (Ti) films deposited by collimation sputtering are studied. In Ti film déposition at the 0.5 /un ohmic contact area (aspect ratio: 3.6), conformality, y/x, defined by the thickness on the bottom, y, to the surface, x, is as low as 6% in conventional sputtering. However, it can be improved to 21% by employing collimation sputtering. Strongly (002)-oriented Ti film is deposited by conventional sputtering. Weakly (002)- and (Oll)-oriented grains, however, are grown in collimation film, with annealing at 650°C of the Ti film deposited on Si, different solid phase silicidation reactions occur at the Ti/Si. That is, metastable C49 TiSi grains are grown in conventional Ti film at 625- 650°C. In collimation film, C54 TiSi grains are preferentially grown at this température. This resuit indicates the formation of a stable C54 TiSi layer with lower sheet résistance. © 1992 IOP Publishing Ltd.
Bibliographic Details
http://www.scopus.com/inward/record.url?partnerID=HzOxMe3b&scp=0026963020&origin=inward; http://dx.doi.org/10.1143/jjap.31.l1746; https://iopscience.iop.org/article/10.1143/JJAP.31.L1746; https://dx.doi.org/10.1143/jjap.31.l1746; https://validate.perfdrive.com/9730847aceed30627ebd520e46ee70b2/?ssa=0dc5cfe3-9027-4e43-a4f1-fca5f288b439&ssb=92105294543&ssc=https%3A%2F%2Fiopscience.iop.org%2Farticle%2F10.1143%2FJJAP.31.L1746&ssi=03ef81c4-cnvj-466b-9f9b-3ce7555550f2&ssk=botmanager_support@radware.com&ssm=162890174790433754117211193129352703&ssn=21f06112b09a70dfb79ddc2cbacebcda013f0900c3c4-8990-4f21-a56d7e&sso=7f150f8c-bc564dd29dea6adca9c9dc16e0a7596f5fa5d2591af32a5d&ssp=29124493181726580351172672635226364&ssq=64262579895802471396229239682898012873509&ssr=NTIuMy4yMTcuMjU0&sst=com.plumanalytics&ssu=&ssv=&ssw=&ssx=eyJyZCI6ImlvcC5vcmciLCJfX3V6bWYiOiI3ZjYwMDBkNzYzNGE3Ni05ZTRkLTRjMmMtYjJhMC1mYzAzNGMyZjE1MjkxNzI2NTI5MjM5NDUzMjY5NzE5MTQ2LTIxMmRlNjIzMGIxMzEyZDM0MTE2MjIiLCJ1em14IjoiN2Y5MDAwMGMxZDc2YmItMzk2MS00N2VjLTlkZGItNjdmYTVhZTY2ODdlNS0xNzI2NTI5MjM5NDUzMjY5NzE5MTQ2LThhMmNiNTYzMGQ0NWU0MzI0MTE1OTgifQ==
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