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Formation of an atomically abrupt Si/Ge hetero-interface

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, ISSN: 0021-4922, Vol: 37, Issue: 3 SUPPL. B, Page: 1311-1315
1998
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Article Description

A novel method has been proposed for forming an abrupt interface in the Si/Ge heterostructures. Solid Si network of two monolayers in thickness was successfully grown on a Ge(100) surface. The Si/Ge transition layer, fablicated by the proposed method and a successive gas-source moleculer beam epitaxy was found to be atomically narrow, since it was less than 1 nm in width which is the resolution limit of the evaluation system.

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