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Deposition of polyethylene thin films using synchrotron radiation ablation

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, ISSN: 0021-4922, Vol: 38, Issue: 2 A, Page: 863-867
1999
  • 11
    Citations
  • 0
    Usage
  • 6
    Captures
  • 0
    Mentions
  • 0
    Social Media
Metric Options:   Counts1 Year3 Year

Metrics Details

  • Citations
    11
    • Citation Indexes
      11
  • Captures
    6

Article Description

Crystalline polyethylene thin films were deposited on Si substrates using the synchrotron radiation(SR) ablation method. The deposited films were characterized by X-ray diffraction and Fourier-transform infrared spectroscopy. In order to understand the mechanism for the decomposition that occurs due to SR ablation, analysis of gases resulting from the decomposition was performed using the quadrupole mass spectrometric method. The mechanism involved in the carbonization was clarified. ©1999 Publication Board, Japanese Journal of Applied Physics.

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