Improvement of compact electron-beam-excited plasma source for increased producible plasma density
Japanese Journal of Applied Physics, ISSN: 0021-4922, Vol: 48, Issue: 7 PART 1
2009
- 9Citations
- 3Captures
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Article Description
Multiple modifications of graphite electrodes of a compact electron-beam-excited plasma (EBEP) source to enhance the cooling efficiency of the electrodes resulted in an increase in the maximum value of producible EBEP density. In addition, experiments on surface nitriding of steel samples in nitrogen EBEP demonstrated that the improved compact EBEP source with modified electrodes outperforms one with conventional electrodes, thereby demonstrating the significant advantage of using the improved source for a wide range of industrial and scientific applications. © 2009 The Japan Society of Applied Physics.
Bibliographic Details
http://www.scopus.com/inward/record.url?partnerID=HzOxMe3b&scp=72049114422&origin=inward; http://dx.doi.org/10.1143/jjap.48.076001; https://iopscience.iop.org/article/10.1143/JJAP.48.076001; https://dx.doi.org/10.1143/jjap.48.076001; https://validate.perfdrive.com/9730847aceed30627ebd520e46ee70b2/?ssa=8cb3309c-a125-48fd-aa96-43aa543814c9&ssb=65853219320&ssc=https%3A%2F%2Fiopscience.iop.org%2Farticle%2F10.1143%2FJJAP.48.076001&ssi=1f08c74f-cnvj-485f-bb97-b1dc90362dbd&ssk=botmanager_support@radware.com&ssm=641532979334810593880787423734243010&ssn=7c52dc19a13927ba087b0826d82ad19a1e6c0900c3c4-8990-4f21-ac47e2&sso=616c5f8c-bc564dd29deaeb896bbfc72fc2751133d8bda5358bc00729&ssp=41097148251726513662172679602835079&ssq=56469459413917221434329239434361971588062&ssr=NTIuMy4yMTcuMjU0&sst=com.plumanalytics&ssu=&ssv=&ssw=&ssx=eyJyZCI6ImlvcC5vcmciLCJfX3V6bWYiOiI3ZjYwMDBkNzYzNGE3Ni05ZTRkLTRjMmMtYjJhMC1mYzAzNGMyZjE1MjkxNzI2NTI5MjM5NDUzMjY0ODk5OTc3LTUyMGUwNTk5MTVmOWFjNmIzODc5ODUiLCJ1em14IjoiN2Y5MDAwMGMxZDc2YmItMzk2MS00N2VjLTlkZGItNjdmYTVhZTY2ODdlNS0xNzI2NTI5MjM5NDUzMjY0ODk5OTc3LTRjY2Q2MGFmM2U3YzBkMTAzODc5NjQifQ==
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