Novel stack structure of magnetic tunnel junction with MgO tunnel barrier prepared by oxidation methods: Preferred grain growth promotion seed layers and bi-layered pinned layer
Japanese Journal of Applied Physics, ISSN: 0021-4922, Vol: 48, Issue: 12
2009
- 24Citations
- 30Captures
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Article Description
Despite superior compatibility to mass-production, magnetic tunnel junction (MTJ) with MgO barrier prepared by oxidation process (MgO) has shown unacceptable magnetotransport properties for proper operation of spintronics devices because poor crystalline MgO cannot properly provide a template for crystallization of amorphous CoFeB layers, thus lack of pseudo-epitaxy in overall. We report novel stack structure for MgO -based MTJ to assure acceptable magnetotransport properties: insertion of preferred-grain-growth-promotion (PGGP) seed layer and bi-layered ferromagnetic pinned layer (bi-PL) to induce preferred grain growth in MgO and crystallization of CoFeB layers at higher temperature annealing. Microstructure analysis confirms highly crystalline MgO in pseudo-epitaxy with fully crystallized CoFeB via PGGP by high temperature annealing, attributed to enhanced thermal stability of bi-PL. Tunneling magnetoresistance (TMR) 132.6% at resistance-area product (RA) 1.2Ωμm and 253% at 5.9Ωμmm from novel MTJ stack successfully satisfy specifications for spintronics devices. © 2009 The Japan Society of Applied Physics.
Bibliographic Details
http://www.scopus.com/inward/record.url?partnerID=HzOxMe3b&scp=75149175531&origin=inward; http://dx.doi.org/10.1143/jjap.48.120214; https://iopscience.iop.org/article/10.1143/JJAP.48.120214; https://dx.doi.org/10.1143/jjap.48.120214; https://validate.perfdrive.com/9730847aceed30627ebd520e46ee70b2/?ssa=5e1a4083-2733-4ed6-957a-09dc29947f1b&ssb=30934286122&ssc=https%3A%2F%2Fiopscience.iop.org%2Farticle%2F10.1143%2FJJAP.48.120214&ssi=8ea8e685-cnvj-4ed7-93bb-c1d2fcc867e2&ssk=botmanager_support@radware.com&ssm=288165070311191892666891785286571741&ssn=9a7a9c0ed189b635f1272a8bea52eb9a11610900c3c4-8990-4f21-abbde0&sso=bd63af8c-bc564dd29dead524c454d7e691cb4408f60229afaa0abf42&ssp=62681317451726502491172670742156880&ssq=48935556958726861350329239854950537552156&ssr=NTIuMy4yMTcuMjU0&sst=com.plumanalytics&ssu=&ssv=&ssw=&ssx=eyJ1em14IjoiN2Y5MDAwMGMxZDc2YmItMzk2MS00N2VjLTlkZGItNjdmYTVhZTY2ODdlNC0xNzI2NTI5MjM5NDUzMjQwMzQ4NDczLWNiYmYxMGExNWQ0YTExZDEyNjY2MjYiLCJfX3V6bWYiOiI3ZjYwMDBkNzYzNGE3Ni05ZTRkLTRjMmMtYjJhMC1mYzAzNGMyZjE1MjkxNzI2NTI5MjM5NDUzMjQwMzQ4NDczLTZlMDI2N2Q3MTY2ZDkzMjMyNjY2NDciLCJyZCI6ImlvcC5vcmcifQ==
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