Numerical simulation of glass imprinting for molding temperature prediction

For optimizing the conditions of glass imprinting, many researchers commonly use the trial-and-error method. Therefore, it is advantageous to carry out a preliminary analysis of glass imprinting. The viscoelastic property of glass is necessary for MEMS-ONE in which a viscoelastic model is used. Assuming glass materials to be viscoelastic boies, the relaxation share modulus was measured by the creep test based on traditional thermo-viscoelastic theory. The Williams-Landel-Ferry (WLF) equation is applied using the temperature dependence of liquid viscosity. We compared experimental results with the analytic results of MEMS-ONE simulation under the conditions of fixed pressure (3.56 MPa) and time (10 min). The object of evaluation is the height of the central position prong. The molding temperature can be predicted within 10 °C error by the simulation. © 2010 The Japan Society of Applied Physics.