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Effect of dynamic bias stress in short-channel (L = 1.5μm) p-type polycrystalline silicon thin-film transistors

Japanese Journal of Applied Physics, ISSN: 0021-4922, Vol: 51, Issue: 2 PART 1
2012
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We have investigated the stability of short-channel (1.5 μm) p-type polycrystalline silicon (poly-Si) thin film transistors (TFTs) under AC bias stress. The threshold voltage of the short-channel (L = 1.5 μm) poly-Si TFT was increased by about -7.44 V after AC bias stress, whereas the threshold voltage of the long-channel poly-Si TFT was relatively stable. A two-step degradation process was also observed. In the first step, the threshold voltage of short-channel poly-Si TFTs underwent a consistent positive shift for 100s. In contrast, the threshold voltage started to undergo a negative shift when accompanied by significant degradation in the subthreshold region. This negative shift of threshold voltage and the significantly degraded subthreshold swing value in the short-channel TFT under dynamic stress may be mainly due to the generation of stress-induced deep- and shallow-level trapping states near the drain junction. © 2012 The Japan Society of Applied Physics.

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