Effect of dynamic bias stress in short-channel (L = 1.5μm) p-type polycrystalline silicon thin-film transistors
Japanese Journal of Applied Physics, ISSN: 0021-4922, Vol: 51, Issue: 2 PART 1
2012
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Article Description
We have investigated the stability of short-channel (1.5 μm) p-type polycrystalline silicon (poly-Si) thin film transistors (TFTs) under AC bias stress. The threshold voltage of the short-channel (L = 1.5 μm) poly-Si TFT was increased by about -7.44 V after AC bias stress, whereas the threshold voltage of the long-channel poly-Si TFT was relatively stable. A two-step degradation process was also observed. In the first step, the threshold voltage of short-channel poly-Si TFTs underwent a consistent positive shift for 100s. In contrast, the threshold voltage started to undergo a negative shift when accompanied by significant degradation in the subthreshold region. This negative shift of threshold voltage and the significantly degraded subthreshold swing value in the short-channel TFT under dynamic stress may be mainly due to the generation of stress-induced deep- and shallow-level trapping states near the drain junction. © 2012 The Japan Society of Applied Physics.
Bibliographic Details
http://www.scopus.com/inward/record.url?partnerID=HzOxMe3b&scp=84863171593&origin=inward; http://dx.doi.org/10.1143/jjap.51.021401; https://iopscience.iop.org/article/10.1143/JJAP.51.021401; https://dx.doi.org/10.1143/jjap.51.021401; https://validate.perfdrive.com/9730847aceed30627ebd520e46ee70b2/?ssa=c067a907-cc25-4f9e-8830-0f1219140af7&ssb=80593225270&ssc=https%3A%2F%2Fiopscience.iop.org%2Farticle%2F10.1143%2FJJAP.51.021401&ssi=b845c87e-cnvj-4698-bad2-d6d761af9b0c&ssk=botmanager_support@radware.com&ssm=968910051452088435562822226254660094&ssn=a66469924eca6debe828d72e988d9275edbd0900c3c4-8990-4f21-a23b05&sso=9b36bf8c-bc564dd29dea00d424859f8d165eda4a53c7f48e6655480c&ssp=26714247281726554036172682289453248&ssq=76393905193904989105829239870697283229795&ssr=NTIuMy4yMTcuMjU0&sst=com.plumanalytics&ssu=&ssv=&ssw=&ssx=eyJyZCI6ImlvcC5vcmciLCJ1em14IjoiN2Y5MDAwMGMxZDc2YmItMzk2MS00N2VjLTlkZGItNjdmYTVhZTY2ODdlNS0xNzI2NTI5MjM5NDUzMzIyNjk5OTAzLTliYzQ0MWJkN2JiNjU2M2E1NTYwODQiLCJfX3V6bWYiOiI3ZjYwMDBkNzYzNGE3Ni05ZTRkLTRjMmMtYjJhMC1mYzAzNGMyZjE1MjkxNzI2NTI5MjM5NDUzMzIyNjk5OTAzLTdkOWI0Y2ZmN2U2MTc4ZjY1NTYxNDEifQ==
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