Influence of the anode on the degradation of the additives in the damascene process for copper deposition
Journal of the Electrochemical Society, ISSN: 0013-4651, Vol: 154, Issue: 3
2007
- 11Citations
- 21Captures
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Article Description
The influence of both soluble and insoluble anodes on the kinetics and morphology of the copper deposit in the damascene process was investigated by voltammetry and impedance techniques. A plating bath known to provide conformal superfilling of trenches and vias in the microelectronic industry was used. It was shown that the use of a glassy carbon anode leads to faster degradation of the plating bath which is detrimental to the copper deposit. A copper anode decreases the aging rate by limiting the anodic potential compared to the glassy carbon anode where high anodic potentials prevail during the copper deposition process. © 2007 The Electrochemical Society.
Bibliographic Details
http://www.scopus.com/inward/record.url?partnerID=HzOxMe3b&scp=33846949032&origin=inward; http://dx.doi.org/10.1149/1.2426897; https://iopscience.iop.org/article/10.1149/1.2426897; https://syndication.highwire.org/content/doi/10.1149/1.2426897; https://dx.doi.org/10.1149/1.2426897; https://validate.perfdrive.com/9730847aceed30627ebd520e46ee70b2/?ssa=7b5d132f-504a-4aa1-87c9-c3d3ae6af027&ssb=58289298742&ssc=https%3A%2F%2Fiopscience.iop.org%2Farticle%2F10.1149%2F1.2426897&ssi=940e2843-cnvj-4a6e-974f-f7e378151379&ssk=botmanager_support@radware.com&ssm=81279848736723023438465760930822836&ssn=38673337200d940a01f5756dc3787c93350c6402f074-4cb6-43cc-b3b65b&sso=580735d5-86644739f8a57515208d402ae38d1f7cf022e2f2fe87beb0&ssp=85333891381728634753172884378030071&ssq=48969376318133933080875883445835551530979&ssr=MzQuMjM2LjI2LjMx&sst=com.plumanalytics&ssu=&ssv=&ssw=&ssx=eyJfX3V6bWYiOiI3ZjYwMDAwMTkwYjQzMC04NzFlLTRjOGEtODhjNS1hOTI5ZGQ5NTBhYzkxNzI4Njc1ODgzNDM1MTg3Mjk3NzY1LTQ0YWY3ODFjYzM0ZjM3Y2U0Mzg0MCIsInV6bXgiOiI3ZjkwMDA1MjAyNTk2Ny04NzMxLTQ5ZGUtODY0OC1jY2U1NWI5ZTRiYWMzLTE3Mjg2NzU4ODM0MzYxODcyOTc3NjQtZDI2ZTkzNDE2N2Y2YTZkYzQzODQwIiwicmQiOiJpb3Aub3JnIn0=
The Electrochemical Society
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