Experimental Determination of Si Self-Interstitial Emission During Oxide Precipitation in Czochralski Silicon
ECS Journal of Solid State Science and Technology, ISSN: 2162-8777, Vol: 13, Issue: 8
2024
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Article Description
We used the method of Torigoe and Ono [J. Appl. Phys., 121, 215103 (2017)] to investigate the kinetics of β, the number of self-interstitials emitted per precipitated oxygen atom, during oxide precipitation in Czochralski silicon. For this purpose, we used pp- epitaxial wafers with a buried highly B-doped epitaxial layer which were annealed with and without thermal pre-treatments at 950 °C. From the results we conclude that in the initial phase of oxide precipitation without thermal pre-treatment β is very high before it drops to low values. With a thermal pre-treatment at 800 °C for 2 h, the initial value of β is somewhat lower before the drop also occurs. If a nucleation anneal is carried out before the thermal treatment at 950 °C the β values are low from the beginning. All of these results confirm our previously published theoretical predictions experimentally. This work also shows that the crystal pulling process can affect the initial β value because grown-in oxide precipitate nuclei can reduce their strain by vacancy absorption. Therefore, high vacancy supersaturation during crystal cooling while oxide precipitate nucleate would lead to somewhat lower initial β values.
Bibliographic Details
http://www.scopus.com/inward/record.url?partnerID=HzOxMe3b&scp=85201365126&origin=inward; http://dx.doi.org/10.1149/2162-8777/ad670d; https://iopscience.iop.org/article/10.1149/2162-8777/ad670d; https://dx.doi.org/10.1149/2162-8777/ad670d; https://validate.perfdrive.com/9730847aceed30627ebd520e46ee70b2/?ssa=25707238-419d-4fc3-9bba-356118b92ac3&ssb=99480266866&ssc=https%3A%2F%2Fiopscience.iop.org%2Farticle%2F10.1149%2F2162-8777%2Fad670d&ssi=c5117e06-cnvj-4a88-bc55-9dd1f3b54219&ssk=botmanager_support@radware.com&ssm=90082880370548675229428555170360224&ssn=01aa6f67e198a3e5855c4a19810d7393b48d6db1c10c-a37a-41b2-be86a2&sso=8b009205-c45fe023bb49cbf957d0ffddc5dd3f13d6d083f18faddd4b&ssp=16234474171723719305172439462111666&ssq=74072082390995687456531741860541894125068&ssr=MzQuMjM2LjI2LjMx&sst=com.plumanalytics&ssu=&ssv=&ssw=&ssx=eyJfX3V6bWYiOiI3ZjYwMDA1NjQyMDdlYy1iZmUwLTQzM2UtYjQ1OC1hYjM1MTQ0YzcxMDcxNzIzNzMxNzQxMjU1NTkyMTY4MzE1LTY1MzM3ODBjMjc3ZTQ1MTEyMjk0MiIsInJkIjoiaW9wLm9yZyIsInV6bXgiOiI3ZjkwMDBhMjUzOGQ5ZS1lNDA0LTQ0NTItODE2NC1jNGY3MWM0YTg5NGY4LTE3MjM3MzE3NDEyNTU1OTIxNjgzMTUtMDkwOTdhN2EyNzIwZGMzMTIyOTQyIn0=
The Electrochemical Society
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