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Ultrahigh-Q photonic crystal cavities in silicon rich nitride

Optics Express, ISSN: 1094-4087, Vol: 25, Issue: 22, Page: 27334-27340
2017
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Article Description

Ultrahigh-Q Photonic Crystal cavities were realized in a suspended Silicon Rich Nitride (SiNx) platform for applications at telecom wavelengths. Using a line width modulated cavity design we achieved a simulated Q of 520,000 with a modal volume of 0.77(λ/n). The fabricated cavities were measured using the resonance scattering technique and we demonstrated a measured Q of 120,000. The experimental spectra at different input power also indicate that the non-linear losses are negligible in this material platform.

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