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Wafer-scale single-aperture near-infrared metalens fabricated by deep UV photolithography

Conference on Lasers and Electro-Optics
2022
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Conference Paper Description

Conference on Lasers and Electro-Optics

Bibliographic Details

Lidan Zhang; Shengyuan Chang; Xi Chen; Yimin Ding; Md Tarek Rahman; Yao; Duan; Pavel Terekhov; Xingjie Ni

Optica Publishing Group

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