Profile estimation for Pt submicron wire on rough Si substrate from experimental data
Optics Express, ISSN: 1094-4087, Vol: 20, Issue: 19, Page: 21678-21686
2012
- 11Citations
- 8Captures
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Example: if you select the 1-year option for an article published in 2019 and a metric category shows 90%, that means that the article or review is performing better than 90% of the other articles/reviews published in that journal in 2019. If you select the 3-year option for the same article published in 2019 and the metric category shows 90%, that means that the article or review is performing better than 90% of the other articles/reviews published in that journal in 2019, 2018 and 2017.
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Article Description
An efficient forward scattering model is constructed for penetrable 2D submicron particles on rough substrates. The scattering and the particle-surface interaction are modeled using discrete sources with complex images. The substrate micro-roughness is described by a heuristic surface transfer function. The forward model is applied in the numerical estimation of the profile of a platinum (Pt) submicron wire on rough silicon (Si) substrate, based on experimental Bidirectional Reflectance Distribution Function (BRDF) data. © 2012 Optical Society of America.
Bibliographic Details
http://www.scopus.com/inward/record.url?partnerID=HzOxMe3b&scp=84866245770&origin=inward; http://dx.doi.org/10.1364/oe.20.021678; http://www.ncbi.nlm.nih.gov/pubmed/23037286; https://www.osapublishing.org/oe/abstract.cfm?uri=oe-20-19-21678; https://www.osapublishing.org/viewmedia.cfm?URI=oe-20-19-21678&seq=0; https://opg.optica.org/oe/abstract.cfm?uri=oe-20-19-21678; https://dx.doi.org/10.1364/oe.20.021678
The Optical Society
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