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Temporally-stable active precision mount for large optics

Optics Express, ISSN: 1094-4087, Vol: 24, Issue: 12, Page: 13527-13541
2016
  • 10
    Citations
  • 0
    Usage
  • 12
    Captures
  • 0
    Mentions
  • 0
    Social Media
Metric Options:   Counts1 Year3 Year

Metrics Details

  • Citations
    10
    • Citation Indexes
      10
  • Captures
    12

Article Description

We present a temporally-stable active mount to compensate for manufacturing-induced deformations of reflective optical components. In this paper, we introduce the design of the active mount, and its evaluation results for two sample mirrors: a quarter mirror of 115 x 105 x 9 mm, and a full mirror of 228 x 210 x 9 mm. The quarter mirror with 20 actuators shows a best wavefront error rms of 10 nm. Its installation position depending deformations are addressed by long-time measurements over 14 weeks indicating no significance of the orientation. Size-induced differences of the mount are studied by a full mirror with 80 manual actuators arranged in the same actuator pattern as the quarter mirror. This sample shows a wavefront error rms of (27±2) nm over a measurement period of 46 days. We conclude that the developed mount is suitable to compensate for manufacturing-induced deformations of large reflective optics, and likely to be included in the overall systems alignment procedure.

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