Laser Ablation Behavior of RB-SiC by Femtosecond Laser Irradiation
SSRN, ISSN: 1556-5068
2022
- 363Usage
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Example: if you select the 1-year option for an article published in 2019 and a metric category shows 90%, that means that the article or review is performing better than 90% of the other articles/reviews published in that journal in 2019. If you select the 3-year option for the same article published in 2019 and the metric category shows 90%, that means that the article or review is performing better than 90% of the other articles/reviews published in that journal in 2019, 2018 and 2017.
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Article Description
In this paper, the femtosecond laser ablation behavior of Reaction-Bonded Silicon Carbide (RB-SiC) was investigated. The ablation threshold of RB-SiC was calculated, which decreases (from 1.01 J/cm2 to 0.56 J/cm2) with increasing pulse number N and finally stabilized. And the ablation radius was predicted for different pulse energies with an error of less than 10%. To investigate the complex morphology of RB-SiC after irradiation, the ablation craters are discussed in two categories based on the SiC grain and Si matrix content in the irradiated region. The results show that LIPSS (periods of 0.76λ ~0.88λ for LSFL and 0.24λ ~ 0.32λ for HSFL), recondensation layer, and ruffles exist on the surface of Crater I, and structures such as grooves, convex, and holes exist on the surface of Crater II. Based on the surface morphology, microstructure, and physical phase analysis of the ablation craters, a preliminary model of the removal mechanism of the ablation craters by femtosecond laser irradiation was established. Finally, the variances of the ablation diameter and ablation volume with laser energy and pulse number are analyzed. These findings are expected to provide theoretical and experimental support for the precision processing of RB-SiC by femtosecond laser.
Bibliographic Details
http://www.scopus.com/inward/record.url?partnerID=HzOxMe3b&scp=85179564859&origin=inward; http://dx.doi.org/10.2139/ssrn.4193017; https://www.ssrn.com/abstract=4193017; https://dx.doi.org/10.2139/ssrn.4193017; https://papers.ssrn.com/sol3/papers.cfm?abstract_id=4193017; https://ssrn.com/abstract=4193017
Elsevier BV
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