Factory Oriented Technique for Thermal Drift Compensation in MEMS Capacitive Accelerometers †
Engineering Proceedings, ISSN: 2673-4591, Vol: 10, Issue: 4
2021
- 2Citations
- 4Captures
Metric Options: Counts1 Year3 YearSelecting the 1-year or 3-year option will change the metrics count to percentiles, illustrating how an article or review compares to other articles or reviews within the selected time period in the same journal. Selecting the 1-year option compares the metrics against other articles/reviews that were also published in the same calendar year. Selecting the 3-year option compares the metrics against other articles/reviews that were also published in the same calendar year plus the two years prior.
Example: if you select the 1-year option for an article published in 2019 and a metric category shows 90%, that means that the article or review is performing better than 90% of the other articles/reviews published in that journal in 2019. If you select the 3-year option for the same article published in 2019 and the metric category shows 90%, that means that the article or review is performing better than 90% of the other articles/reviews published in that journal in 2019, 2018 and 2017.
Citation Benchmarking is provided by Scopus and SciVal and is different from the metrics context provided by PlumX Metrics.
Example: if you select the 1-year option for an article published in 2019 and a metric category shows 90%, that means that the article or review is performing better than 90% of the other articles/reviews published in that journal in 2019. If you select the 3-year option for the same article published in 2019 and the metric category shows 90%, that means that the article or review is performing better than 90% of the other articles/reviews published in that journal in 2019, 2018 and 2017.
Citation Benchmarking is provided by Scopus and SciVal and is different from the metrics context provided by PlumX Metrics.
Article Description
Capacitive MEMS accelerometers have a high thermal sensitivity that drifts the output when subjected to changes in temperature. To improve their performance in applications with thermal variations, it is necessary to compensate for these effects. These drifts can be compensated using a lightweight algorithm by knowing the characteristic thermal parameters of the accelerometer (Temperature Drift of Bias and Temperature Drift of Scale Factor). These parameters vary in each accelerometer and axis, making an individual calibration necessary. In this work, a simple and fast calibration method that allows the characteristic parameters of the three axes to be obtained simultaneously through a single test is proposed. This method is based on the study of two specific orientations, each at two temperatures. By means of the suitable selection of the orientations and the temperature points, the data obtained can be extrapolated to the entire working range of the accelerometer. Only a mechanical anchor and a heat source are required to perform the calibration. This technique can be scaled to calibrate multiple accelerometers simultaneously. A lightweight algorithm is used to analyze the test data and obtain the compensation parameters. This algorithm stores only the most relevant data, reducing memory and computing power requirements. This allows it to be run in real time on a low-cost microcontroller during testing to obtain compensation parameters immediately. This method is aimed at mass factory calibration, where individual calibration with traditional methods may not be an adequate option. The proposed method has been compared with a traditional calibration using a six-sided orthogonal die and a thermal camera. The average difference between the compensations according to both techniques is 0.32 mg/°C, calculated on an acceleration of 1 G; the maximum deviation being 0.6 mg/°C.
Bibliographic Details
Provide Feedback
Have ideas for a new metric? Would you like to see something else here?Let us know