Stiffness detection of silicon arm based on micro-loading method
Applied Mechanics and Materials, ISSN: 1662-7482, Vol: 670-671, Page: 1290-1295
2014
- 4Captures
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Example: if you select the 1-year option for an article published in 2019 and a metric category shows 90%, that means that the article or review is performing better than 90% of the other articles/reviews published in that journal in 2019. If you select the 3-year option for the same article published in 2019 and the metric category shows 90%, that means that the article or review is performing better than 90% of the other articles/reviews published in that journal in 2019, 2018 and 2017.
Citation Benchmarking is provided by Scopus and SciVal and is different from the metrics context provided by PlumX Metrics.
Metrics Details
- Captures4
- Readers4
Conference Paper Description
A micro-loading stiffness detection method for micro-miniature components with brittle and complicated structure has been proposed to achieve stiffness detection of silicon arm. This paper adopts the methord of combing finite element analysis and micro-loading experiment together. Finally, the paper analyzed the deviation of silicon arm’s stiffness values obtained by simulation and experiment, and comparatively analyzed the variation tendency of silicon arm’s stiffness value among different claws. Result shows: the silicon arm’s stiffness value and the stiffness variation tendency obtained by experiment agrees well with it which is obtained by simulation. It proves the stiffness detection method is reliable and rational to achieve the stiffness detection of silicon arm.
Bibliographic Details
http://www.scopus.com/inward/record.url?partnerID=HzOxMe3b&scp=84920829076&origin=inward; http://dx.doi.org/10.4028/www.scientific.net/amm.670-671.1290; http://www.scientific.net/AMM.670-671.1290; http://www.scientific.net/AMM.670-671.1290.pdf; https://www.scientific.net/AMM.670-671.1290; https://www.scientific.net/AMM.670-671.1290.pdf; https://dx.doi.org/10.4028/www.scientific.net/amm.670-671.1290
Trans Tech Publications
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