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BiTiO and BiLa TiO thin films prepared by RF magnetron sputtering

Key Engineering Materials, ISSN: 1662-9795, Vol: 434-435, Page: 296-299
2010
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Conference Paper Description

BiTiO (BTO) and Bi LaTiO (BLT) ferroelectric thin films were deposited on Pt/Si substrates by RF magnetron sputtering with BiTiO (BTO) and BiLa TiO (BLT) targets with 50-mm diameter and 5-mm thickness. The microstructure and ferroelectric properties of thin films were investigated. The grain growth behavior and ferroelectric properties such as remanent polarization were different in these two kinds of film, the effects of La doping in the BLT thin film were very obvious. © (2010) Trans Tech Publications.

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