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Optimising the growth of few-layer graphene on silicon carbide by nickel silicidation

Materials Science Forum, ISSN: 1662-9752, Vol: 740-742, Page: 121-124
2013
  • 1
    Citations
  • 0
    Usage
  • 10
    Captures
  • 0
    Mentions
  • 0
    Social Media
Metric Options:   Counts1 Year3 Year

Metrics Details

  • Citations
    1
    • Citation Indexes
      1
  • Captures
    10

Conference Paper Description

Few-layers graphene (FLG) films were grown by local solid phase epitaxy on a semi- insulating 6H-SiC substrate by annealing Ni films deposited on the Si- and C-terminated faces of the SiC. X-ray photoelectron spectroscopy was used to verify the presence of graphene on the sample surface. The impact of the annealing process on the FLG final quality was studied by monitoring the peak position and intensity ratios of the Raman spectra. We also demonstrate that further device fabrication steps such as dielectric deposition can be carried out without compromising the FLG films integrity. © (2013) Trans Tech Publications, Switzerland.

Bibliographic Details

Enrique Escobedo-Cousin; Konstantin Vassilevski; Toby Hopf; Nick G. Wright; Anthony O’Neill; Alton B. Horsfall; Jonathan Goss; Peter Cumpson

Trans Tech Publications, Ltd.

Materials Science; Physics and Astronomy; Engineering

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