Fabrication of MgB nanowire single-photon detector with meander structure
Applied Physics Express, ISSN: 1882-0778, Vol: 6, Issue: 2
2013
- 29Citations
- 32Captures
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Article Description
We report the fabrication of a MgB nanowire single-photon detector (SSPD or SNSPD) with a meander structure and its optical response. In-situ passivation of AlN is quite effective for both protecting the MgB surface from oxidation and from damage during the Ar ion milling process. Meander patterns of 10 × 10 μm with the line widths between 225 to 135 nm are obtained without degradation. The meander with the line width of 135 nm exhibits the capacity for detecting single photons at λ = 1550 nm. Copyright © 2013 The Japan Society of Applied Physics.
Bibliographic Details
http://www.scopus.com/inward/record.url?partnerID=HzOxMe3b&scp=84875150366&origin=inward; http://dx.doi.org/10.7567/apex.6.023101; http://stacks.iop.org/1882-0786/6/i=2/a=023101?key=crossref.770a84906f833fe717dbf07c8f3bf376; https://iopscience.iop.org/article/10.7567/APEX.6.023101; http://stacks.iop.org/1882-0786/6/i=2/a=023101/pdf; https://dx.doi.org/10.7567/apex.6.023101; https://validate.perfdrive.com/9730847aceed30627ebd520e46ee70b2/?ssa=32495d4a-e6ab-4849-87cd-c8cd2d68c701&ssb=04824261796&ssc=https%3A%2F%2Fiopscience.iop.org%2Farticle%2F10.7567%2FAPEX.6.023101&ssi=d2f4d16b-cnvj-4d67-9856-c034d72f524e&ssk=botmanager_support@radware.com&ssm=61779176789006814813131199400820762&ssn=6b6cbf20c5a38434d4dde2cbedfca222bc84fe105911-65fe-48dc-8ed2c0&sso=43ad2150-9319bfde79b5c47ae7fe7617ad71884764e5bdd7dfe8a1e2&ssp=19361261011726298924172636662394571&ssq=26814936124243810382963731874580156575412&ssr=NTIuMy4yMTcuMjU0&sst=com.plumanalytics&ssu=&ssv=&ssw=&ssx=eyJyZCI6ImlvcC5vcmciLCJfX3V6bWYiOiI3ZjYwMDBmY2NjNzQxOC1mYzFiLTRjNmEtODMwYS1iMjY5YmYxNWM5NTIxNzI2MjYzNzMxNDQwOTc1MTA2MTMtYjEwNmM0MjAzZjMzZThhZDgxMzAxIiwidXpteCI6IjdmOTAwMDM2Y2Q3MWI0LWMxNWMtNDk1YS1hYzYxLTUzOGFiMTFjNGY3YTMtMTcyNjI2MzczMTQ0MDk3NTEwNjEzLWEwZTk2MWZiYzM0MzQ3ZmU4MTI5OCJ9
Japan Society of Applied Physics
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